00616 2200145 4500245002600000020001500026700001400041650001300055005001900068260003700087041001200124084001200136300002700148500029500175 aVLSI TechnologyhText a0070626863 aSze, S.M. aElektrik a20210403124119 aNew York, USAbMcGraw Hillc1983 aEnglish a621.391 aix, 654 hlm. :c24 cm. aThe book is intended as textbook for senior undergraduate or first-year graduate students in electrical engineering, applied physics, and material science; it assumes that the reader has already acquired an introductory understanding of the physics and technology of semiconductor devices.